MEMS: Optical Switches

Research being conducted in the field of micro-electromechanical systems (MEMS) with emphasis in optical switches. An array of mirrors re-directs light information (from fiber optics) by means of rotating metallic mirrors actuated by a voltage. These devices can be used in telecommunications and are used to improve the brightness in digital projectors. This new technology will replace more costly, less efficient systems and provide this advantage at the micron-scale. These devices require silicon processing which consist of photo lithography, deep reaction ion etching (DRIE), and flip-chip bonding. Testing includes the use of an optical microscope fitted with a laser-vibrometer, an optical-profilometer, and a scanning electron microscope (SEM). Analysis and design is assisted by 3-D modeling software such as Solidworks and ANSYS 5.7. Currently, the prototype is exceeding expectations and has shown only a few setbacks. Some adjustments in bonding techniques and gaining access to better equipment would most likely improve these inaccuracies. Future research will hopefully add to the already vast improvements made to the current designs. Furthermore, the recent application of metals into micro-electromechanical systems has already started to transform conventional thought and is on its way to setting the standard for MEMS devices.